Spesifikasi | LMT-XY-200X200 | ABVT-Z20 (Air bantalan rel) |
Tipe Motor | Motor wesi telung fase | Voice coil motor + |
Resolusi | Jumlah digital 100nm standar | 1vpp mudhun kanggo 5nm |
Motor dorong | Terus menerus 60N/puncak 210N | Terus menerus 60N/puncak 210N |
Ukuran langkah minimal [nm] | 200nm | 100nm |
Lelungan [mm] | 200×200 | 10 |
Repeatability [um] | ± 0.3 | |
Akurasi Posisi [um] | ± 1 | ± 0,5 |
Flatness [um] | 10um | 5um |
Straightness [um] | 1um | 1um |
Kacepetan maksimal [mm/s] | 500 mm/s | 30 mm/s |
Kapasitas Beban [kg] | 5kg (sumbu Z kanthi bobot keseimbangan gaya konstan pneumatik) |